Journal of Mechatronics, Electrical Power, and Vehicular Technology

Riyanto, Edy, State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Material Science and Engineering, Donghua University, Shanghai 201620, China

• Vol 3, No 2 (2012) - Article
  A Review of Atomic Layer Deposition for Nanoscale Devices
  Abstract  PDF

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